Simulation of MEMS Based Flexible Flow Sensor for Biomedical Application

Arterial disease, especially Coronary Artery Disease (CAD) is one of the leading causes of premature morbidity and mortality. During the flow, blood not only interacts with vessel wall mechanically but also chemically which modulates the plaque formation in blood vessel thus leading to coronary artery diseases. Here we propose to simulate a MEMS based flexible flow sensor based on anemometer principle which is designed to integrate at a catheter tip. This sensor will be useful for on-line monitoring of body fluid during catheter based operation. Simulation work has been carried out in COMSOL 4.1 which includes optimal resistive heater design and identification of suitable substrate material for realization of the heater on a flexible polymer followed by its steady as well as transient CFD analysis.